The application and validation of a new robust windowing method for the Poisson yield model

Author

Langford, Rick E. ; Liou, Juin J. ; Raghavan, Venkat

Author_Institution

Agere Syst., Singapore

fYear

2001

fDate

2001

Firstpage

157

Lastpage

160

Abstract

In this paper, a simple robust method of extracting the systematic and random components of yield is presented. The method has proven to be robust in its implementation in systems to automate the analysis of wafer probe bin map data spanning several years for multiple cleanrooms and technologies. The method´s ability to detect systematic yield loss is evaluated and its dependence on die size is discussed. The application of data sub-setting to the results, which allows focused analysis of yield problems, is shown to be effective

Keywords

circuit analysis computing; data analysis; inspection; integrated circuit yield; integrated software; semiconductor process modelling; Poisson yield model; cleanrooms; data sub-setting; die size; random yield components; robust windowing method; system implementation; systematic yield components; systematic yield loss; wafer probe bin map data analysis; wafer sort yield; yield problem analysis; Area measurement; Data mining; Design engineering; Engineering management; Fitting; Poisson equations; Probes; Robustness; Semiconductor device modeling; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI

Conference_Location

Munich

ISSN

1078-8743

Print_ISBN

0-7803-6555-0

Type

conf

DOI

10.1109/ASMC.2001.925640

Filename

925640