The Search for a Reliable MEMS Switch

The RF community has long been searching for the ideal switch since the birth of electronics, and it is defined as a device having virtually no insertion loss (Ron = 0 Ω) over a wide frequency range, very high isolation [off-state capacitance (Coff)] = 0 fF), extremely high linearity (IIP2 and IIP3 → infinite), medium- to high-power handling (100 mW to 1 kW), and no dc power consumption. Our entire RF infrastructure ecosystem, from communication system networks, to satellite systems, to wideband spectral analysis, to instrumentation and radar systems, uses a variety of switches for signal routing and control (attenuation, phase shifting, etc.). The ideal switch was achieved long time ago using electromechanical relays, and even after nearly 100 years, it is still the best RF switch ever made from an electrical perspective [1]. It has very low insertion loss (Ron <;1 Ω), very high isolation (Coff of few fF), very high linearity and high power handling (100 mW to 50 W). However, it is bulky, expensive, and has an average lifetime of few million cycles.