Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers

Author

Menoni, C.S. ; Vaschenko, G. ; Brizuela, F. ; Brewer, C. ; Wang, Y. ; Larotonda, M.A. ; Luther, B.M. ; Marconi, M.C. ; Rocca, J.J. ; Chao, W. ; Liddle, J.A. ; Liu, Y. ; Anderson, E.H. ; Attwood, D.T. ; Vinogradov, A.V. ; Artioukov, I.A. ; Pershyn, Y.P. ;

Author_Institution

Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO

fYear

2006

fDate

Oct. 2006

Firstpage

895

Lastpage

896

Abstract

In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds. Its spatial resolution has been determined to be 120-150 nm

Keywords

image resolution; laser beam applications; optical microscopy; ultraviolet sources; 13 nm; 46.9 nm; image quality; nanometer-scale resolution microscopy; reflection modes; spatial resolution; table-top extreme ultraviolet lasers; transmission modes; Biomedical optical imaging; Chaos; Image resolution; Laser modes; Nanobioscience; Optical imaging; Optical microscopy; Optical saturation; Spatial resolution; Ultraviolet sources;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE

Conference_Location

Montreal, Que.

Print_ISBN

0-7803-9555-7

Electronic_ISBN

0-7803-9555-7

Type

conf

DOI

10.1109/LEOS.2006.279114

Filename

4054476