DocumentCode :
3133103
Title :
Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers
Author :
Menoni, C.S. ; Vaschenko, G. ; Brizuela, F. ; Brewer, C. ; Wang, Y. ; Larotonda, M.A. ; Luther, B.M. ; Marconi, M.C. ; Rocca, J.J. ; Chao, W. ; Liddle, J.A. ; Liu, Y. ; Anderson, E.H. ; Attwood, D.T. ; Vinogradov, A.V. ; Artioukov, I.A. ; Pershyn, Y.P. ;
Author_Institution :
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO
fYear :
2006
fDate :
Oct. 2006
Firstpage :
895
Lastpage :
896
Abstract :
In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds. Its spatial resolution has been determined to be 120-150 nm
Keywords :
image resolution; laser beam applications; optical microscopy; ultraviolet sources; 13 nm; 46.9 nm; image quality; nanometer-scale resolution microscopy; reflection modes; spatial resolution; table-top extreme ultraviolet lasers; transmission modes; Biomedical optical imaging; Chaos; Image resolution; Laser modes; Nanobioscience; Optical imaging; Optical microscopy; Optical saturation; Spatial resolution; Ultraviolet sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
Conference_Location :
Montreal, Que.
Print_ISBN :
0-7803-9555-7
Electronic_ISBN :
0-7803-9555-7
Type :
conf
DOI :
10.1109/LEOS.2006.279114
Filename :
4054476
Link To Document :
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