Title :
AlGaAsSb buffer/barrier layer on GaAs substrate for InAs channel with high electron properties
Author :
Miya, S. ; Muramatsu, S. ; Kuze, N. ; Nagase, K. ; Iwabuchi, T. ; Ichii, A. ; Ozaki, M. ; Shibasa, I.
Author_Institution :
Electron. Mater. & Devices Lab., Asahi Chem. Ind. Co. Ltd., Shizuoka, Japan
Abstract :
InAs/AlGaAsSb deep quantum wells were successfully formed on GaAs substrate and examined for two electron devices: Hall elements (HEs) and field-effect transistors (FETs). With a thin buffer layer of 600 nm AlGaAsSb on a GaAs substrate, we observed high electron mobility of more than 20000 cm2/Vsec and an effective electron velocity of 2.2×107 cm/sec at RT for a 15 nm thick InAs channel. AlGaAsSb, lattice-matched to InAs, was discussed from the viewpoints of insulating property, carrier confinement and oxidization. Reliability data good enough for practical use were also obtained for HEs. We propose AlGaAsSb as a promising buffer/barrier layer material for InAs channel devices on GaAs substrates, and we suggest AlGaAsSb also for InGaAs channel devices
Keywords :
Hall effect devices; III-V semiconductors; aluminium compounds; electron mobility; gallium arsenide; high electron mobility transistors; indium compounds; molecular beam epitaxial growth; semiconductor device reliability; semiconductor growth; semiconductor quantum wells; 15 nm; 33 GHz; 600 nm; AlGaAsSb barrier layer; AlGaAsSb buffer layer; AlGaAsSb-GaAs; GaAs; GaAs substrate; Hall elements; InAs channel devices; InAs-AlGaAsSb; InAs/AlGaAsSb deep quantum wells; InGaAs; InGaAs channel devices; MBE growth; carrier confinement; effective electron velocity; field-effect transistors; high electron mobility; insulating property; lattice-matching; oxidization; reliability; Buffer layers; Carrier confinement; Chemical elements; Electron devices; Electron mobility; FETs; Gallium arsenide; Insulation; Laboratories; Lattices;
Conference_Titel :
Indium Phosphide and Related Materials, 1995. Conference Proceedings., Seventh International Conference on
Conference_Location :
Hokkaido
Print_ISBN :
0-7803-2147-2
DOI :
10.1109/ICIPRM.1995.522174