• DocumentCode
    3134554
  • Title

    Experimental Study on Uniform Heating Control based on Temperature Difference Model

  • Author

    Nanno, Ikuo ; Hashida, Shimpei ; Matsunaga, Nobutomo ; Kawaji, Shigeyasu

  • Author_Institution
    Kumamoto Univ., Kumamoto
  • fYear
    2007
  • fDate
    8-10 May 2007
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    Thermal distribution in thermal processes, which is observed in both steady and transient states, causes inferior quality. Thus, uniform temperature control is extremely required in many industrial application fields for quality improvement. Conventional control based on black-box model is cheap for the control of thermal plant with strong interference. Therefore, we have proposed a novel control design method for uniform heating using the temperature difference model (TDM). In this paper the effectiveness of the proposed controller is evaluated experimentally.
  • Keywords
    control system synthesis; heating; industrial control; manufacturing processes; quality control; temperature control; control design mehod; industrial application; manufacturing processes; quality improvement; temperature control; temperature difference model; thermal distribution; uniform heating control; Control design; Control system synthesis; Feedback; Heating; Interference; Manufacturing processes; Semiconductor devices; Temperature control; Temperature distribution; Time division multiplexing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Mechatronics, ICM2007 4th IEEE International Conference on
  • Conference_Location
    Kumamoto
  • Print_ISBN
    1-4244-1183-1
  • Electronic_ISBN
    1-4244-1184-X
  • Type

    conf

  • DOI
    10.1109/ICMECH.2007.4280059
  • Filename
    4280059