Title :
Experimental Study on Uniform Heating Control based on Temperature Difference Model
Author :
Nanno, Ikuo ; Hashida, Shimpei ; Matsunaga, Nobutomo ; Kawaji, Shigeyasu
Author_Institution :
Kumamoto Univ., Kumamoto
Abstract :
Thermal distribution in thermal processes, which is observed in both steady and transient states, causes inferior quality. Thus, uniform temperature control is extremely required in many industrial application fields for quality improvement. Conventional control based on black-box model is cheap for the control of thermal plant with strong interference. Therefore, we have proposed a novel control design method for uniform heating using the temperature difference model (TDM). In this paper the effectiveness of the proposed controller is evaluated experimentally.
Keywords :
control system synthesis; heating; industrial control; manufacturing processes; quality control; temperature control; control design mehod; industrial application; manufacturing processes; quality improvement; temperature control; temperature difference model; thermal distribution; uniform heating control; Control design; Control system synthesis; Feedback; Heating; Interference; Manufacturing processes; Semiconductor devices; Temperature control; Temperature distribution; Time division multiplexing;
Conference_Titel :
Mechatronics, ICM2007 4th IEEE International Conference on
Conference_Location :
Kumamoto
Print_ISBN :
1-4244-1183-1
Electronic_ISBN :
1-4244-1184-X
DOI :
10.1109/ICMECH.2007.4280059