Title :
Epitaxial Ba/sub x/Sr/sub 1-x/TiO/sub 3/ thin films for microwave phase shifters
Author :
Kim, B.J. ; Baik, S. ; Poplavko, Y. ; Prokopenko, Y. ; Lim, J.Y. ; Kim, B.M.
Author_Institution :
Dept. of Mater. Sci. & Eng., Pohang Inst. of Sci. & Technol., South Korea
Abstract :
A tunable phase shifter was fabricated with epitaxial Ba0.5 Sr0.5TiO3 (BST) thin film and gold thin film in a coplanar waveguide (CPW) configuration. The BST thin film of ~0.5 μm in thickness was deposited by laser ablation on a MgO(001) single crystalline substrate. Gold electrodes of ~2 μm in thickness was prepared by thermal evaporation, followed by electroplating and wet chemical etching. Dimensional configuration of the CPW phase shifter was determined after optimizing impedance matching at 50 ohm using FEM simulation. Epitaxial quality of the BST thin film was confirmed by X-ray diffraction. Microwave performance of the phase shifter was measured at room temperature in the frequency range of 8~12 GHz, and with applied bias voltage of up to 30 V. Effect of Mn dopant in the epitaxial films was also considered
Keywords :
X-ray diffraction; barium compounds; coplanar waveguide components; epitaxial layers; ferroelectric thin films; finite element analysis; impedance matching; microwave phase shifters; pulsed laser deposition; strontium compounds; 30 V; 8 to 12 GHz; Au; BST epitaxial thin film; BaSrTiO/sub 3/; BaSrTiO/sub 3/:Mn; FEM; MgO; MgO single crystalline substrate; Mn dopant; X-ray diffraction; coplanar waveguide; electroplating; ferroelectric material; gold electrode; impedance matching; laser ablation; numerical simulation; thermal evaporation; tunable microwave phase shifter; wet chemical etching; Binary search trees; Chemical lasers; Coplanar waveguides; Gold; Phase shifters; Sputtering; Strontium; Temperature measurement; Transistors; Tunable circuits and devices;
Conference_Titel :
Microwave Conference, 2000 Asia-Pacific
Conference_Location :
Sydney, NSW, Australia
Print_ISBN :
0-7803-6435-X
DOI :
10.1109/APMC.2000.925981
