Versatile Size and Shape Microlens Arrays With High Numerical Apertures

Author

Lee, Hyung Jong ; Yanghee Kim ; Eui-Sung Yoon ; Il-Joo Cho

Author_Institution

Brain Sci. Inst., Korea Inst. of Sci. & Technol., Seoul, South Korea

Volume

23

Issue

4

fYear

2014

fDate

Aug. 2014

Firstpage

771

Lastpage

773

Abstract

We present close-packed microlens arrays (MLAs) with high numerical aperture (NA) over a large range of dimensions based on glass blowing process and replication method. Polydimethylsiloxane (PDMS) MLAs with diameters from (50~mu ) m to 1 mm and a high NA of 0.37 (maximum achievable NA for a PDMS plano-convex lens) are demonstrated, which are difficult to achieve with the conventional methods for large microlenses. In addition, MLAs with various fill-factors up to 96.1% and different base shapes are demonstrated. By adjusting the cavity depth and the chamber pressure, the ratio of sag height and diameter can be further adjusted.

Keywords

microlenses; optical arrays; optical polymers; replica techniques; MLA; PDMS; cavity depth; chamber pressure; glass blowing process; high numerical apertures; microlens arrays; plano-convex lens; polydimethylsiloxane; replication method; Cavity resonators; Glass; Lenses; Microoptics; Optical device fabrication; Optical refraction; Glass reflow; high numerical aperture; microlens arrays; replication method; replication method.;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2014.2305993

Filename

6824238