Title :
A novel Ka-band bandpass filter using LIGA micromachined process
Author :
Park, K.Y. ; Park, J.Y. ; Choi, H.K. ; Lee, J.C. ; Lee, B. ; Kim, J.H. ; Kim, N.Y. ; Park, Jae Young ; Kim, D.W. ; Kim, D.W. ; Bu, J.U. ; Chung, K.W.
Author_Institution :
RFIC Res. & Educ. Center & Mission Technol Res. Center, Kwangwoon Univ., Seoul, South Korea
Abstract :
A novel class of three dimensional (3-D) micromachined microwave planar filter at Ka-band is presented using LIGA process. The filter shows wide bandpass characteristic of 39% with the insertion loss of 1.7 dB at 33.2 GHz, and can be applicable in high power MMIC or MIMIC
Keywords :
LIGA; band-pass filters; micromachining; microstrip filters; microwave filters; 1.7 dB; 33.2 GHz; Ka-band; LIGA process; RF MEMS; insertion loss; micromachining; microwave planar filter; three-dimensional microstrip bandpass filter; Band pass filters; Conductors; Impedance; MMICs; Microstrip; Microwave devices; Microwave filters; Microwave technology; Radio frequency; Radiofrequency integrated circuits;
Conference_Titel :
Microwave Conference, 2000 Asia-Pacific
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-6435-X
DOI :
10.1109/APMC.2000.926074
