Design a current sensor based MOEMS technology

In this paper a micro free-end cantilever-beam made of magnetic material with a movable mass attached to the free-end has been proposed to sense current changing in power line. The cantilever-beam sensing structure is designed based on MEMS technology to respond applied magnetic field. The deflection of the cantilever was measured using optical sensing method. The benefit of MEMS technology is in developing devices with a lower cost, lower power consumption, higher performance and greater integration. The analysis result showed that output voltage due the light intensity changing has a linear relationship in a certain range based on the schematic of the designed beam size.