Image processing plume fluence for superconducting thin-film depositions

Author

Jones, J.G. ; Biggers, R.R. ; Busbee, J.D. ; Dempsey, D.V. ; Kozlowski, G.

Author_Institution

Res. Lab., Wright-Patterson AFB, OH, USA

Volume

2

fYear

1999

fDate

1999

Firstpage

1317

Abstract

Process control is a crucial element in all deposition techniques. It is especially elusive in the versatile and efficient deposition technique known as pulsed-laser-deposition (PLD). Image processed emissions from the plume of a YBa₂Cu₃O_7-x (YBCO) target are monitored in situ to determine two dimensional spatial information about the plume. Manual and fuzzy-logic based regulation of laser energy based on this plume emission feedback resulted in improved film quality and repeatability of the PLD thin-film depositions. Imaging of the plume under various deposition conditions, both with and without process control, will help to improve understanding of the effect of changing environmental conditions on the plume characteristics

Keywords

barium compounds; control nonlinearities; fuzzy control; high-temperature superconductors; image processing; optical control; process control; pulsed laser deposition; superconducting thin films; yttrium compounds; 2D spatial information; YBa₂Cu₃O_7-x target; YBaCuO; changing environmental conditions; control nonlinearities; fuzzy associative memory bank; fuzzy-logic based regulation; image processed emissions; improved film quality; in situ imaging; laser energy; plume characteristics; plume emission feedback; process control; process identification; pulsed-laser-deposition; repeatability; superconducting thin-film deposition; Image processing; Logic; Sputtering; Superconducting thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Processing and Manufacturing of Materials, 1999. IPMM '99. Proceedings of the Second International Conference on

Conference_Location

Honolulu, HI

Print_ISBN

0-7803-5489-3

Type

conf

DOI

10.1109/IPMM.1999.791562

Filename

791562