Air and magnetic bearings for a laser beam deflection unit

Author

van den Bosch, P.P.J. ; Damen, A.A.H.

Author_Institution

Dept. of Electr. Eng., Eindhoven Univ. of Technol., Netherlands

Volume

5

fYear

1997

fDate

4-6 Jun 1997

Firstpage

2987

Abstract

Laser interferometry is an established technology for accurate distance measurements. For flexible measurements in 3D, the laser beam has to be directed at a possible moving object. This goal can be achieved with a deflection unit, consisting of one or two mirrors. To maintain accuracy and bandwidth of the measurement device, this mirror has to be positioned accurately and fast. The paper describes two deflection units, one base on an air bearing and one on a magnetic bearing, as a possible design. Their construction, mathematical models and simulations are included

Keywords

distance measurement; light interferometers; measurement by laser beam; optical tracking; position control; 3D measurements; accuracy; air bearing; distance measurements; laser beam deflection unit; laser interferometry; magnetic bearing; mathematical models; position control; tracking; Bandwidth; Friction; Gas lasers; Laser beams; Laser feedback; Laser modes; Magnetic levitation; Mirrors; Semiconductor lasers; Structural beams;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 1997. Proceedings of the 1997

Conference_Location

Albuquerque, NM

ISSN

0743-1619

Print_ISBN

0-7803-3832-4

Type

conf

DOI

10.1109/ACC.1997.612005

Filename

612005