Title :
Alcohol and organic vapours sensor based on nano-sized TiO2 thin film
Author :
Comini, E. ; Faglia, G. ; Sberveglieri, G. ; Atashbar, M.Z. ; Wlodarski, W.
Author_Institution :
Dipt. di Chimica e Fisica per i Mater., Brescia Univ., Italy
Abstract :
We have studied the gas sensing properties of nanosized TiO2 thin films undoped and with 1% Nb2O5 and 0.1, 0.5% Pt doping towards ethanol, trichloroethylene and toluene. The sensors were prepared using a sol-gel process on alumina substrates. Some possible interfering gases were tested and the sensitivity was negligible with respect to the target gases responses. Doping with a high concentration of Pt enhances the response by about ten times towards toluene and ethanol. Doping at lower concentrations of platinum enhances the selectivity toward toluene with respect to the undoped samples
Keywords :
electric sensing devices; gas sensors; nanostructured materials; semiconductor thin films; sol-gel processing; titanium compounds; Al2O3; TiO2-Nb2O5; TiO2-Pt; alcohol sensor; alumina substrates; ethanol; nanostructured thin film; organic vapours sensor; sol-gel process; toluene; trichloroethylene; Annealing; Chemicals; Doping; Ethanol; Gases; Sputtering; Substrates; Testing; Thin film sensors; Transistors;
Conference_Titel :
Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
0-7803-4513-4
DOI :
10.1109/COMMAD.1998.791647
