DocumentCode
3139416
Title
Optical and electrical properties of chemically deposited CdS thin films modified by air annealing
Author
Gluszak, Edward A. ; Hinckley, Steven
Author_Institution
Center for Very High Speed Microelectron. Syst., Edith Cowan Univ., Joondalup, WA, Australia
fYear
1999
fDate
1999
Firstpage
426
Lastpage
429
Abstract
Polycrystalline CdS thin films have been grown by chemical bath deposition (CBD) using cadmium acetate and thiourea as the Cd and S ion sources. The as-deposited films show a low degree of crystallinity, are very resistive (conductivity ~10-7 Ω-1·cm-1) and possess a small degree of photosensitivity. Air annealing of the films at 100-400°C for 1 hr converts them to n-type through partial conversion of CdS to CdO. This is accompanied by an increase in the photoconductivity by more than 6 orders of magnitude. The optical bandgaps of the as-deposited films were >2.38 eV, which decreased to ~2.24 eV after air annealing
Keywords
II-VI semiconductors; annealing; cadmium compounds; carrier lifetime; energy gap; liquid phase deposition; optical constants; photoconductivity; semiconductor thin films; 100 to 400 degC; 1E-7 (ohmcm)-1; CdS; air annealing; chemical bath deposition; conductivity; crystallinity; optical bandgap; photoconductivity; photosensitivity; polycrystalline thin films; Annealing; Cadmium compounds; Chemicals; Conductive films; Conductivity; Crystallization; Ion sources; Optical films; Particle beam optics; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on
Conference_Location
Perth, WA
Print_ISBN
0-7803-4513-4
Type
conf
DOI
10.1109/COMMAD.1998.791680
Filename
791680
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