Title :
Developing a spiral scanning method using atomic force microscopy
Author :
Habibullah ; Pota, Hemanshu R. ; Petersen, Ian R.
Author_Institution :
SEIT, Univ. of New South Walse, Canberra, ACT, Australia
Abstract :
In this paper, we present a spiral scanning method using an atomic force microscope (AFM). A spiral motion is generated by applying slowly varying amplitude sine wave in the X-axis and cosine wave in the Y-axis of the piezoelectric tube (PZT) scanner of the AFM. An LQG controller also designed for damping the resonant mode of the PZT scanner for the lateral positioning of the AFM scanner stage. In this control design, an internal model of the reference sinusoidal signal is introduced with the plant model and an integrator with the system error is introduced. A vibration compensator is also designed and included in the feedback loop with the plant to suppress the vibration of the PZT at the resonant frequency. Experimental results demonstrate the effectiveness of the proposed scheme.
Keywords :
atomic force microscopy; controllers; feedback; linear quadratic Gaussian control; piezoelectric actuators; position control; vibration control; AFM scanner stage lateral positioning; LQG controller; atomic force microscopy; cosine wave; feedback loop; piezoelectric tube scanner; reference sinusoidal signal; resonant frequency; resonant mode damping; sine wave; spiral motion; spiral scanning method; system error; vibration compensator; vibration suppression; Damping; Mathematical model; Microscopy; Resonant frequency; Sensors; Spirals; Vibrations;
Conference_Titel :
Control Conference (ASCC), 2013 9th Asian
Conference_Location :
Istanbul
Print_ISBN :
978-1-4673-5767-8
DOI :
10.1109/ASCC.2013.6606378