Author :
Baltes, H. ; Haberli, Andreas
Author_Institution :
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
The co-integration of MEMS and CMOS technology is reviewed and the IC MEMS CAD tools SOLIDIS and ICMAT are outlined
Keywords :
CMOS integrated circuits; circuit CAD; integrated circuit design; integrated circuit technology; micromechanical devices; CMOS MEMS technology; IC CAD tool; ICMAT; SOLIDIS; CMOS integrated circuits; CMOS technology; Dielectrics; Etching; Heat sinks; Heat transfer; Micromachining; Micromechanical devices; Microstructure; Silicon;
Conference_Titel :
Circuits and Systems, 1997. ISCAS '97., Proceedings of 1997 IEEE International Symposium on
Print_ISBN :
0-7803-3583-X
DOI :
10.1109/ISCAS.1997.612910
