DocumentCode
313981
Title
CMOS MEMS
Author
Baltes, H. ; Haberli, Andreas
Author_Institution
Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Volume
4
fYear
1997
fDate
9-12 Jun 1997
Firstpage
2813
Abstract
The co-integration of MEMS and CMOS technology is reviewed and the IC MEMS CAD tools SOLIDIS and ICMAT are outlined
Keywords
CMOS integrated circuits; circuit CAD; integrated circuit design; integrated circuit technology; micromechanical devices; CMOS MEMS technology; IC CAD tool; ICMAT; SOLIDIS; CMOS integrated circuits; CMOS technology; Dielectrics; Etching; Heat sinks; Heat transfer; Micromachining; Micromechanical devices; Microstructure; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 1997. ISCAS '97., Proceedings of 1997 IEEE International Symposium on
Print_ISBN
0-7803-3583-X
Type
conf
DOI
10.1109/ISCAS.1997.612910
Filename
612910
Link To Document