Title :
Prototype instrument for sheet resistance measurement by pulse voltage excitation
Author :
Saotome, Hideo ; Kaneko, Hironori
Author_Institution :
Grad. Sch. of Eng., Chiba Univ., Chiba, Japan
Abstract :
A novel contactless method for measurement of the sheet resistance of a semiconductor wafer, that utilizes pulse voltage excitation, has been proposed by one of the authors. This novel method was applied and a prototype instrument was developed that can measure sheet resistance under 5 mQ/sq, which is the same as the smallest value for the conventional contactless method.
Keywords :
electric resistance measurement; prototypes; contactless method; prototype instrument; pulse voltage excitation; semiconductor wafer; sheet resistance measurement; Capacitors; Current measurement; Electrical resistance measurement; Magnetic cores; Resistance; Semiconductor device measurement; Voltage measurement; contactless measuremnt; eddy current; magnetic induction; pulse voltage excitation; sheet resistance;
Conference_Titel :
Sensing Technology (ICST), 2013 Seventh International Conference on
Conference_Location :
Wellington
Print_ISBN :
978-1-4673-5220-8
DOI :
10.1109/ICSensT.2013.6727717
