Unconventional methods and unconventional materials for microfabrication

Author

Whitesides, George M.

Author_Institution

Dept. of Chem., Harvard Univ., Cambridge, MA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

23

Abstract

This talk will outline the rapid progress in soft lithography-microcontact printing, micromolding in capillaries, and transfer molding of organic polymers. These new techniques cover only a part of the range of problems in the fabrication, testing and production of microelectronic systems, but they have an immediate, broad application in a number of other areas requiring small systems from homogeneous self-assembled monolayers (SAMs) to transistors, and from molecular self-assembly to the self-assembly of macro-scale objects

Keywords

lithography; microassembling; micromechanical devices; molecular electronics; monolayers; polymers; MEMS; capillaries; homogeneous self-assembled monolayers; macro-scale object self-assembly; microcontact printing; microelectronic systems; microfabrication; micromolding; molecular self-assembly; organic polymers; soft lithography; transfer molding; transistors; unconventional materials; unconventional methods; Biological materials; Chemistry; Fabrication; Nanostructures; Organic materials; Polymers; Printing; Self-assembly; Soft lithography; Transfer molding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613571

Filename

613571