Title :
Two dimensional micro conveyance system with through holes for electrical and fluidic interconnection
Author :
Mita, Yoshio ; Konishi, Satoshi ; Fujita, Hiroyuki
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
A fluidic micro actuator array with through-the-wafer interconnection is fabricated. Actuators are composed of micro cantilevers over through holes. Cantilevers pass/cut the air flow which is applied from the backside via the through hole nozzles. Each through hole is also used for electrical interconnection by evaporating Au metal on it. The actuator array is assembled with an IC controller to construct an autonomous distributed conveyance system
Keywords :
arrays; conveyors; fluidic devices; integrated circuit interconnections; microactuators; nozzles; Au; Au metal evaporation; IC controller; actuator array; air flow; autonomous distributed conveyance system; electrical interconnection; fluidic interconnection; micro cantilevers; through hole nozzles; through holes; two dimensional micro conveyance system; Actuators; Anisotropic magnetoresistance; Chromium; Control systems; Fluidic microsystems; Gold; Integrated circuit interconnections; Microactuators; Microfluidics; Sputter etching;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613575
