Title :
The electrostatic ultrasonic micromotor
Author :
Danel, J.S. ; Charvel, P. ; Robert, Ph ; Villard, P.
Author_Institution :
CEA, Centre d´´Etudes Nucleaires de Grenoble, France
Abstract :
A new ultrasonic micromotor has been designed, consisting of a silicon membrane, excited by means of electrostatic forces to generate a travelling flexural wave. A rotor, placed atop the membrane, is propelled by this wave through frictional forces. This motor presents an advantageous alternative to more conventional micromotors: no need to realise good quality piezoelectric layers, wide choice for the rotor material, high torque and low speed due to its inherent gear reduction
Keywords :
electrostatic devices; elemental semiconductors; membranes; micromotors; rotors; silicon; stators; torque; ultrasonic motors; Si; Si membrane; electrostatic force excitation; electrostatic ultrasonic micromotor; frictional forces; gear reduction; high torque; low speed; rotor material; travelling flexural wave; Biomembranes; Damping; Electrodes; Electrostatics; Micromotors; Pistons; Propulsion; Rotors; Silicon; Stators;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613579
