Optimization of silicon longitudinal mode ultrasonic actuators, with application to surgery

Author

Lal, Amit ; White, Richard M.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

57

Abstract

An analytical electromechanical model of a silicon/PZT laminate longitudinal mode resonant transducer is presented. The excellent agreement between the measured and calculated impedances based on the analytical model proves the validity of the model. For a typical device used for ultrasonic surgery, the experimental data shows a maximum value of 34 for the product of the quality factor and the effective electromechanical coupling. This figure of merit product, an indication of the power output capacity of a transducer, is two to three times higher than that of the currently used metal-based transducers. Force required to ultrasonically cut tissue with the optimized transducer is presented

Keywords

acoustic impedance; biomedical equipment; biomedical ultrasonics; electromechanical effects; elemental semiconductors; lead compounds; piezoceramics; piezoelectric actuators; piezoelectric transducers; radiation therapy; silicon; surgery; ultrasonic transducers; Si longitudinal mode ultrasonic actuators; Si-PZT; Si-PbZrO3TiO3; Si/PZT laminate longitudinal mode resonant transducer; analytical electromechanical model; effective electromechanical coupling; figure of merit product; force; impedances; optimized transducer; power output capacity; quality factor and; surgery; tissue ultrasonic cutting; ultrasonic surgery; Actuators; Analytical models; Impedance measurement; Laminates; Q factor; Resonance; Silicon; Surgery; Ultrasonic transducers; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613580

Filename

613580