Title :
Angular and linear microvibromotor
Author :
Hélin, Philippe ; Sadaune, Véronique ; Druon, Christian
Author_Institution :
Dept. Opto-Acous.-Electron., Inst. d´´Electron. et de Microelecton. du Nord, Villeneuve d´´Ascq, France
Abstract :
This paper reports a novel ultrasonic driven microvibromotor. An angular and linear microvibromotor is obtained from a motorization by surface acoustic waves generated from an interdigital transducer on a LiNbO3 substrate. The linear and rotational movements are obtained according to the position of the slider with respect to the acoustic beam. The displacement of the slider is controlled from the burst duration applied across the interdigital transducer. This device is capable of nanometer resolution, for a travel area of over 40 mm square and of rotation until 360° with a resolution better than 0.1
Keywords :
interdigital transducers; linear motors; micromotors; position control; sliding friction; surface acoustic wave transducers; ultrasonic motors; LiNbO3; LiNbO3 substrate; acoustic beam; angular linear microvibromotor; burst duration; frictional contact; interdigital transducer; nanometer resolution; slider displacement control; slider position; surface acoustic waves; travel area; ultrasonic driven microvibromotor; Acoustic beams; Acoustic transducers; Acoustic waves; Actuators; Friction; Nanoscale devices; Substrates; Surface acoustic wave devices; Surface acoustic waves; Vibration measurement;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613581
