A micro shutter for applications in optical and thermal detectors

Author

Kraus, Th ; Balzer, Matthias ; Obermeier, E.

Author_Institution

Microsensor & Micractuator Technol. Center, Tech. Univ. Berlin, Germany

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

67

Abstract

This paper reports on an electrostatically driven micro shutter for optical or thermal detectors. The design is based on a surface micromachined micromotor with rotor diameters of 800 μm and 1200 μm, respectively. An aperture of 100×200 μm² or 200×300 μm² is etched from the backside of the substrate. Parts of the rotor and the whole backside are coated with a thin gold layer to reduce IR transmittance. The shutter is applied in a pyroelectric detector and the operation is characterized. Minimum driving voltages are 35 V to 60 V and the number of revolutions ranges from 0 rpm up to more than 7000 rpm

Keywords

electrostatic devices; microactuators; micromotors; optical sensors; pyroelectric detectors; radiometers; thermal variables measurement; 35 to 60 V; 800 to 1200 mum; Au; Au thin layer; IR transmittance; electrostatically driven micro shutter; micro shutter; minimum driving voltages; optical detectors; pyroelectric detector; rotor diameters; surface micromachined micromotor; thermal detectors; Apertures; Choppers; Electrodes; Electromagnetic measurements; Lenses; Micromotors; Optical detectors; Pyroelectricity; Rotors; Stators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613583

Filename

613583