Title :
High-speed micro-electromechanical light modulation arrays
Author :
Perregaux, G. ; Weiss, P. ; Kloeck, B. ; Vuilliomenet, H. ; Thiébaud, J.P.
Author_Institution :
CSEM Centre Suisse d´´Electron. et de Microtech. SA, Neuchatel, Switzerland
Abstract :
Arrays of electromechanically operated optical microshutters have been designed, fabricated with polysilicon micromachining and tested. An innovative operation principle is described, which combines high switching speed, large lateral displacement while keeping low operating voltage. The main results obtained are switching speed of 50 μs for a lateral displacement of 30 μm, at a switching voltage of typically 70 V
Keywords :
elemental semiconductors; integrated optics; microactuators; optical elements; optical modulation; silicon; 30 mum; 50 mus; 70 V; Si; electromechanically operated optical microshutters; lateral displacement; microelectromechanical light modulation arrays; polysilicon micromachining; switching speed; switching voltage; Blades; Electrodes; Electrostatics; High speed optical techniques; Micromachining; Optical arrays; Optical modulation; Optical surface waves; Switches; Voltage;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613584
