• DocumentCode
    314106
  • Title

    Torsional force probes optimized for higher order mode suppression

  • Author

    Stowe, Timothy ; Yasumura, Kevin ; Pfafman, Tim ; Kenny, Thomas ; Botkin, David ; Rugar, Daniel

  • Author_Institution
    Stanford Univ., CA, USA
  • Volume
    1
  • fYear
    1997
  • fDate
    16-19 Jun 1997
  • Firstpage
    141
  • Abstract
    We describe the design of a micromechanical torsional cantilever made from silicon nitride which is optimized for high force sensitivity and higher order mode suppression. The unique geometry and wide mode modal spacing of the torsional cantilever allow simplified feedback control for the purpose of damping thermomechanical noise
  • Keywords
    damping; feedback; force measurement; micromechanical resonators; microsensors; probes; semiconductor device noise; silicon compounds; torsion; Si3N4; feedback control; high force sensitivity; high-order mode suppression; micromechanical torsional cantilever; silicon nitride; thermomechanical noise damping; torsional force probes; Atomic force microscopy; Damping; Feedback control; Magnetic noise; Noise level; Probes; Resonance; Spatial resolution; Thermal force; Thermomechanical processes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
  • Conference_Location
    Chicago, IL
  • Print_ISBN
    0-7803-3829-4
  • Type

    conf

  • DOI
    10.1109/SENSOR.1997.613602
  • Filename
    613602
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=314106