Title :
Torsional force probes optimized for higher order mode suppression
Author :
Stowe, Timothy ; Yasumura, Kevin ; Pfafman, Tim ; Kenny, Thomas ; Botkin, David ; Rugar, Daniel
Author_Institution :
Stanford Univ., CA, USA
Abstract :
We describe the design of a micromechanical torsional cantilever made from silicon nitride which is optimized for high force sensitivity and higher order mode suppression. The unique geometry and wide mode modal spacing of the torsional cantilever allow simplified feedback control for the purpose of damping thermomechanical noise
Keywords :
damping; feedback; force measurement; micromechanical resonators; microsensors; probes; semiconductor device noise; silicon compounds; torsion; Si3N4; feedback control; high force sensitivity; high-order mode suppression; micromechanical torsional cantilever; silicon nitride; thermomechanical noise damping; torsional force probes; Atomic force microscopy; Damping; Feedback control; Magnetic noise; Noise level; Probes; Resonance; Spatial resolution; Thermal force; Thermomechanical processes;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613602
