Title :
Designing, realization and characterization of a novel capacitive pressure/flow sensor
Author :
Oosterbroek, R.E. ; Lammerink, T.S.J. ; Berenschot, J.W. ; van den Berg, A. ; Elwenspoek, M.C.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
This paper reports the design, realization and characterization results of an integrated pressure/flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises highly accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques
Keywords :
capacitance measurement; flow measurement; flowmeters; microsensors; pressure measurement; pressure sensors; capacitive pressure/flow sensor; flow-rate measurement; hydraulic resistor; liquids; micro analysis systems; micromachining techniques; pressure measurement; Biomembranes; Capacitance; Capacitive sensors; Electrodes; Fluid flow control; Fluid flow measurement; Pressure measurement; Resistors; Sensor phenomena and characterization; Sensor systems;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613605
