Title :
Design and fabrication of micromirror array supported by vertical springs
Author :
Shin, Jong-Woo ; Chung, Seok-Whan ; Kim, Yong-Kweon ; Choi, Bum Kyoo
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
A 50×50 μm2 aluminum micromirror array is fabricated using surface micromachining technology. 50 by 50 micromirrors are arrayed two dimensionally. A micromirror plate is supported by a vertical spring structure which is placed underneath the mirror plate. With this structure, when the mirror plates reflect light, the micromirror array can have a large effective reflecting area. Only one mask and one shadow evaporation process is used in the fabrication of vertical springs. Measurement of the electromechanical characteristics of the fabricated micromirror revealed that the downward threshold voltage was 8 V, the step response time was 20 μs when a 29 V step voltage was applied, and the resonant frequency was 11 kHz
Keywords :
aluminium; arrays; frequency response; micromachining; micromechanical devices; mirrors; optical design techniques; optical fabrication; optical testing; step response; 11 kHz; 20 mus; 29 V; 50 mum; 8 V; Al; downward threshold voltage; electromechanical characteristics; large effective reflecting area; mask; micromirror array; resonant frequency; shadow evaporation process; step response time; step voltage; surface micromachining technology; two dimensional arrays; vertical spring structure; vertical spring structure support; Aluminum; Fabrication; Frequency measurement; Micromachining; Micromirrors; Mirrors; Optical arrays; Springs; Threshold voltage; Time measurement;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613618
