Title :
A silicon microsuspension for disk drive applications
Author :
Narbutovskih, M. ; Field, L. ; Clifford, G. ; Henze, D. ; Burriesci, D. ; Williams, J. ; Beck, P.
Author_Institution :
Hewlett-Packard Co., Palo Alto, CA, USA
Abstract :
A silicon miniature gimbal suspension with integrated metal leads for disk drive heads has been designed, fabricated, and tested. Details on the structure itself and the fabrication process alternatives are given. In the course of this project a new technique for making structures from SOI-like starting materials was developed. The silicon micromachined gimbals were tested successfully on a disk spin stand
Keywords :
elemental semiconductors; hard discs; magnetic recording; micromachining; semiconductor technology; silicon; silicon-on-insulator; SOI-like starting materials; Si; Si microsuspension; Si miniature gimbal suspension; design; disk drive applications; disk drive heads; disk spin stand; fabrication; integrated metal leads; micromachined gimbals; pico slider; testing; Assembly; Disk drives; Fabrication; Magnetic heads; Silicon; Springs; Steel; Testing; Torque; Wires;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613623
