Title :
A chemical microanalysis system as a microfluid system demonstrator
Author :
Richter, M. ; Prak, A. ; Naundorf, J. ; Eberl, M. ; Leeuwis, H. ; Woias, P. ; Steckenborn, A.
Author_Institution :
Fraunhofer-Inst. for Solid State Technol., Munich, Germany
Abstract :
An integrated microfluid demonstrator with outer dimensions of 19.5×43 mm2 was developed comprising three micro pumps, three flow sensors, two conductivity sensors and two passive check valves. The devices are mounted onto a silicon backplane, micro channels are etched on its backside to connect all devices. The demonstrator, controlled by a system control, is able to perform a measurement cycle including sensor calibration, sample sucking, conductivity measurement and rinsing. During the development, a proposal concerning a general interfacing standard for microfluid systems was worked out
Keywords :
calibration; chemical analysis; flow measurement; flowmeters; fluidic devices; micropumps; microsensors; valves; 19.5 mm; 43 mm; Si; Si backplane; chemical microanalysis; conductivity measurement; conductivity sensors; demonstrator; flow sensors; measurement cycle; micro channels; micro pumps; microanalysis system; microfluid system demonstrator; microfluid systems; passive check valves; rinsing; sample sucking; sensor calibration; Backplanes; Chemical sensors; Conductivity measurement; Control systems; Etching; Micropumps; Performance evaluation; Sensor systems; Silicon; Valves;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613644
