Self-assembled microactuated XYZ stages for optical scanning and alignment

Author

Fan, Li ; Wu, Ming C. ; Choquette, Kent D. ; Crawford, Mary H.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

319

Abstract

A novel self-assembled, surface-micromachined micro-XYZ stage with large displacements and fine positioning accuracy has been demonstrated on a Si microoptical bench for optical scanning/alignment applications. Continuous lateral scanning up to 120 μm and vertical scanning up to 250 μm have been achieved with integrated scratch drive actuators (SDA), which have step resolutions of 27 nm. The XYZ stage can be fully assembled by applying an electric bias only. Focus adjustment of the micro-Fresnel lens integrated on the micro-XYZ stage has also been successfully demonstrated. This is useful for two-dimensional scanning, dynamic focusing/tracking, and fine optical alignment

Keywords

integrated optics; lenses; microactuators; micromachining; optical fabrication; optical focusing; optical scanners; optical tracking; optical workshop techniques; physical instrumentation control; position control; silicon; Focus adjustment; Si; Si microoptical bench; continuous lateral scanning; dynamic focusing/tracking; electric bias; fine optical alignment; fine positioning accuracy; integrated scratch drive actuators; large displacements; micro-Fresnel lens; optical alignment; optical scanning; self-assembled microactuated XYZ stages; step resolutions; surface-micromachined micro-XYZ stage; two-dimensional scanning; vertical scanning; Actuators; Assembly; Integrated optics; Lenses; Microactuators; Microoptics; Optical interconnections; Optical refraction; Optical sensors; Self-assembly;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613648

Filename

613648