Title :
Actuated polysilicon micromirrors for raster-scanning displays
Author :
Kiang, Meng-Hsiung ; Francis, Dan A. ; Chang-Hasnain, Connie J. ; Solgard, O. ; Lau, Kam Y. ; Muller, Richard S.
Author_Institution :
California Univ., Berkeley, CA, USA
Abstract :
We have designed and fabricated polysilicon microscanners using surface micromachining technologies. The scanners have electrostatic-comb actuators to drive 300×400 μm2 micromirrors mounted on stationary frames by torsion bars. Torsion-bar mounting improves scanning precision from what is achievable using hinge mounting with journal bearings. The scans are accurate to 0.19 mrad; that is a scan jitter of 0.1% of the full scale, or 9% of a pixel. A 7×10-pixel laser-scanning display built with a 7-element, fan-diode-laser array and a scanning polysilicon micromirror is presented. A dual axis, raster-scanning system based on similar resonant microscanners can be integrated on a chip with the light sources to produce compact microdisplay modules
Keywords :
display devices; electrostatic devices; elemental semiconductors; integrated optics; jitter; microactuators; micromachining; mirrors; optical fabrication; optical scanners; physical instrumentation control; semiconductor laser arrays; silicon; torsion; 300 mum; 400 mum; Si; actuated polysilicon micromirrors; chip integration; compact microdisplay modules; dual axis raster-scanning system; electrostatic-comb actuators; fan-diode-laser array; laser-scanning display; light sources; polysilicon microscanners; raster-scanning displays; scan jitter; scanning polysilicon micromirror; scanning precision; stationary frames; surface micromachining; torsion-bar mounting; Bars; Displays; Electrostatic actuators; Fasteners; Jitter; Light sources; Micromachining; Micromirrors; Optical arrays; Resonance;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613649
