Title :
The 2-dimensional micro scanner integrated with PZT thin film actuator
Author :
Kawabata, Tatsuo ; Ikeda, Masaaki ; Goto, Hiroshi ; Matsumoto, Mikio ; Yada, Tsuneji
Author_Institution :
Central R&D Lab., OMRON Corp., Ibaraki, Japan
Abstract :
The new silicon micromachined optical scanner integrated with a PZT thin film actuator has been developed for a super miniaturized scanning type optical sensor. The scanner driven by the PZT thin film microactuator is able to scan a light beam in two directions with a scanning angle of 4.7 degree. The size of the scanner is 2 mm×4 mm×0.4 mm. The design of the scanner used the design method including air damping consideration. The measurement value of the resonant frequency was in good agreement with the calculated value using this design method. This design method is useful to predict the dynamic characteristics of a microminiaturized scanner integrated with a PZT thin film actuator
Keywords :
damping; elemental semiconductors; lead compounds; microactuators; micromachining; mirrors; optical design techniques; optical scanners; optical sensors; physical instrumentation control; piezoceramics; piezoelectric actuators; silicon; 0.4 mm; 2 mm; 2-dimensional micro scanner; 4 mm; PZT thin film actuator; Si; Si-PZT; Si-PbZrO3TiO3; integrated structure; silicon micromachined optical scanner; super miniaturized scanning type optical sensor; Actuators; Design methodology; Integrated optics; Microactuators; Optical films; Optical sensors; Semiconductor thin films; Silicon; Thin film sensors; Transistors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613653
