Title :
Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry
Author :
Brugger, J. ; Willemin, M. ; Rossel, C. ; Beljakovic, G. ; Vettiger, P.
Author_Institution :
Zurich Res. Lab., IBM Res. Div., Ruschlikon, Switzerland
Abstract :
We describe the fabrication and first characterization of piezoresistive cantilevers developed for ultrasensitive torque magnetometry. The levers have been designed to optimize the sensing in both flexion and torsion modes
Keywords :
magnetometers; microsensors; piezoresistive devices; semiconductor technology; silicon-on-insulator; Si-SiO2; flexion; microfabrication; piezoresistive cantilevers; torque magnetometry; torsion modes; ultrasensitive piezoresistive cantilevers; ultrasensitive torque magnetometry; Etching; Fabrication; Magnetic anisotropy; Magnetic field measurement; Magnetic sensors; Perpendicular magnetic anisotropy; Piezoresistance; Resists; Superconducting magnets; Torque measurement;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613674
