Title :
Micromachined ferroelectric transducers for acoustic imaging
Author :
Bernstein, J. ; Houston, K. ; Niles, L. ; Finberg, S. ; Chen, H. ; Cross, L.E. ; Li, K. ; Udayakumar, K.
Author_Institution :
C.S. Draper Lab., Cambridge, MA, USA
Abstract :
Sub-millimeter-sized ferroelectric monomorph sonar transducers have been built using sol-gel PZT on micromachined silicon wafers. 8×8 transducer arrays have been tested in water in the frequency range of 0.3 to 2 MHz. An improved sol-gel process has yielded crack-free PZT films up to 12 μm in thickness, 12× thicker than previously reported. Sensitivity, frequency response, acoustic images and beam patterns are presented. High-resolution acoustic images at a range of 2 m were made using the arrays and an acoustic lens. Applications include high-frequency imaging sonars, medical ultrasound, ultrasonic communication links, and flaw detection
Keywords :
ferroelectric devices; ferroelectric thin films; frequency response; hydrophones; lead compounds; micromachining; piezoceramics; piezoelectric transducers; sensitivity; sol-gel processing; sonar arrays; sonar imaging; ultrasonic imaging; ultrasonic transducer arrays; 0.3 to 2 MHz; 12 mum; PZT-Si; PbZrO3TiO3-Si; acoustic imaging; acoustic lens; beam patterns; crack-free PZT films; ferroelectric monomorph sonar transducers; flaw detection; frequency response; high-frequency imaging sonars; high-resolution acoustic images; hydrophone array; medical ultrasound; micromachined Si wafers; micromachined ferroelectric transducers; sensitivity; sol-gel PZT; transducer arrays; ultrasonic communication links; Acoustic imaging; Acoustic testing; Acoustic transducers; Biomedical acoustics; Ferroelectric films; Ferroelectric materials; Frequency; Silicon; Sonar detection; Ultrasonic imaging;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613675
