Ultrasound transducer for distance measurements

Author

Hornung, M. ; Brand, O. ; Paul, O. ; Baltes, H.

Author_Institution

Lab. fur Phys. Chem., Eidgenossische Tech. Hochschule, Zurich, Switzerland

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

441

Abstract

We report on optimized micromachined silicon membrane resonators for ultrasound based proximity sensing and distance measurement. The dependence of the ultrasound generation efficiency on the dimensions of the ultrasound transducer is systematically investigated. Our experimental results are supported with reliable numerical simulations to calculate the optimal resonator geometry. It is found that membranes with smaller area generate larger sound pressure

Keywords

acoustic resonators; distance measurement; elemental semiconductors; finite element analysis; membranes; micromachining; micromechanical resonators; position measurement; silicon; ultrasonic transducers; FEM simulation; Si; distance measurement; numerical simulations; optimal resonator geometry; optimized micromachined Si membrane resonators; sound pressure; transducer dimensions; ultrasound based proximity sensing; ultrasound generation efficiency; ultrasound transducer; Acoustic transducers; Biomembranes; Distance measurement; Etching; Fabrication; Frequency; Silicon; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613680

Filename

613680