Title :
Ultrasound transducer for distance measurements
Author :
Hornung, M. ; Brand, O. ; Paul, O. ; Baltes, H.
Author_Institution :
Lab. fur Phys. Chem., Eidgenossische Tech. Hochschule, Zurich, Switzerland
Abstract :
We report on optimized micromachined silicon membrane resonators for ultrasound based proximity sensing and distance measurement. The dependence of the ultrasound generation efficiency on the dimensions of the ultrasound transducer is systematically investigated. Our experimental results are supported with reliable numerical simulations to calculate the optimal resonator geometry. It is found that membranes with smaller area generate larger sound pressure
Keywords :
acoustic resonators; distance measurement; elemental semiconductors; finite element analysis; membranes; micromachining; micromechanical resonators; position measurement; silicon; ultrasonic transducers; FEM simulation; Si; distance measurement; numerical simulations; optimal resonator geometry; optimized micromachined Si membrane resonators; sound pressure; transducer dimensions; ultrasound based proximity sensing; ultrasound generation efficiency; ultrasound transducer; Acoustic transducers; Biomembranes; Distance measurement; Etching; Fabrication; Frequency; Silicon; Ultrasonic imaging; Ultrasonic transducers; Ultrasonic variables measurement;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613680
