Title :
Tip integration on arrays of silicon micro cantilevers with self exciting piezoelectric sensor for parallel atomic force microscopy applications
Author :
Indermühle, P.F. ; Schürmann, G. ; Racine, G.A. ; de Rooij, N.F.
Author_Institution :
IMT, Neuchatel Univ., Switzerland
Abstract :
Self sharpening tips have been integrated on arrays of cantilevers provided with self exciting piezoelectric sensors (ZnO) by using monocrystalline silicon micromachining. Atomic force microscopy (AFM) images of grids with periods of 0.25 μm, 1 μm and 5 μm and with height differences of 100 nm, 15 nm and 180 nm respectively have been achieved with single cantilevers
Keywords :
atomic force microscopy; elemental semiconductors; microactuators; micromachining; piezoelectric actuators; silicon; 0.25 to 5 mum; 15 to 180 nm; Si; ZnO; height differences; microcantilevers; micromachining; parallel atomic force microscopy applications; self exciting piezoelectric sensor; self sharpening tips; tip integration; Atomic force microscopy; Fabrication; Force sensors; Protection; Resists; Sensor arrays; Silicon compounds; Sputter etching; Wet etching; Zinc oxide;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613683
