DocumentCode
314162
Title
Tip integration on arrays of silicon micro cantilevers with self exciting piezoelectric sensor for parallel atomic force microscopy applications
Author
Indermühle, P.F. ; Schürmann, G. ; Racine, G.A. ; de Rooij, N.F.
Author_Institution
IMT, Neuchatel Univ., Switzerland
Volume
1
fYear
1997
fDate
16-19 Jun 1997
Firstpage
451
Abstract
Self sharpening tips have been integrated on arrays of cantilevers provided with self exciting piezoelectric sensors (ZnO) by using monocrystalline silicon micromachining. Atomic force microscopy (AFM) images of grids with periods of 0.25 μm, 1 μm and 5 μm and with height differences of 100 nm, 15 nm and 180 nm respectively have been achieved with single cantilevers
Keywords
atomic force microscopy; elemental semiconductors; microactuators; micromachining; piezoelectric actuators; silicon; 0.25 to 5 mum; 15 to 180 nm; Si; ZnO; height differences; microcantilevers; micromachining; parallel atomic force microscopy applications; self exciting piezoelectric sensor; self sharpening tips; tip integration; Atomic force microscopy; Fabrication; Force sensors; Protection; Resists; Sensor arrays; Silicon compounds; Sputter etching; Wet etching; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613683
Filename
613683
Link To Document