Three dimensionally structured transducers for chemical and biochemical sensors

Author

Conrath, N. ; Czupor, N. ; Steinkuhl, R. ; Sundermeier, C. ; Trau, D. ; Wittkampf, M. ; Hinkers, H. ; Meusel, M. ; Chemnitius, G. ; Knoll, M. ; Spener, F. ; Cammann, K.

Author_Institution

Inst. fur Chemo- und Bioensorik, Munich, Germany

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

481

Abstract

Chemical sensors and biosensors based on three-dimensionally structured silicon transducers have been developed. With the inclusion of the third wafer dimension some severe problems related to the combination of IC-fabrication technologies and the technologies for the integration of membranes and biological sensor components have been minimized. Two transducer concepts are presented which both are full mass-production compatible in all fabrication steps. With the inclusion of the third wafer dimension more flexibility is achieved for the integration of sensors in μTAS modules and microsystems. Measurement results of the sensors are presented for environmental and medical applications

Keywords

biosensors; chemical sensors; elemental semiconductors; integrated circuit technology; microsensors; organic compounds; proteins; silicon; μTAS modules; 3D structured transducers; Clark sensor; IC-fabrication; O₂; O₂ sensor; Si; Si transducers; biochemical sensors; biosensors; chemical sensors; environmental applications; enzyme sensor; flexibility; glucose sensor; mass-production; medical applications; microelectrodes; microsystems; Biomedical equipment; Biomedical transducers; Biomembranes; Biosensors; Chemical sensors; Chemical technology; Chemical transducers; Fabrication; Medical services; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613691

Filename

613691