Title :
A chemical micro analysis system for measurement of pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence
Author :
Norlin, Peter ; Öhman, Ove ; Ekström, Björn ; Forssén, Lili
Author_Institution :
Ind. Microelectron. Center, IMC, Kista, Sweden
Abstract :
A miniaturized multisensor system, intended for simultaneous measurement of six different parameters in a liquid flow, is presented. The system combines a multisensor chip, a micromachined flow-through cell and optical fiber interfaces to monitor pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence. Measurement results show that the performance of the system can compete with that of conventional stand-alone sensors
Keywords :
chromatography; electrical conductivity measurement; flow measurement; flowmeters; fluorescence spectroscopy; micromachining; microsensors; pressure measurement; pressure sensors; temperature measurement; thermistors; ultraviolet spectroscopy; UV-absorption measurement; bulk micromachining; chemical microanalysis system; conductivity measurement; flow rate measurement; fluorescence measurement; liquid chromatography; liquid flow; manufacturability; micro-total analysis system; micromachined flow-through cell; miniaturized multisensor system; multisensor chip; optical fiber interfaces; packaging; piezoresistive pressure transducer; pressure measurement; simultaneous measurement; temperature measurement; thermal fluid flow sensor; thermistor; Chemical analysis; Fluid flow; Fluid flow measurement; Image motion analysis; Monitoring; Multisensor systems; Optical fibers; Pressure measurement; Semiconductor device measurement; Temperature sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613698
