A chemical micro analysis system for measurement of pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence

Author

Norlin, Peter ; Öhman, Ove ; Ekström, Björn ; Forssén, Lili

Author_Institution

Ind. Microelectron. Center, IMC, Kista, Sweden

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

507

Abstract

A miniaturized multisensor system, intended for simultaneous measurement of six different parameters in a liquid flow, is presented. The system combines a multisensor chip, a micromachined flow-through cell and optical fiber interfaces to monitor pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence. Measurement results show that the performance of the system can compete with that of conventional stand-alone sensors

Keywords

chromatography; electrical conductivity measurement; flow measurement; flowmeters; fluorescence spectroscopy; micromachining; microsensors; pressure measurement; pressure sensors; temperature measurement; thermistors; ultraviolet spectroscopy; UV-absorption measurement; bulk micromachining; chemical microanalysis system; conductivity measurement; flow rate measurement; fluorescence measurement; liquid chromatography; liquid flow; manufacturability; micro-total analysis system; micromachined flow-through cell; miniaturized multisensor system; multisensor chip; optical fiber interfaces; packaging; piezoresistive pressure transducer; pressure measurement; simultaneous measurement; temperature measurement; thermal fluid flow sensor; thermistor; Chemical analysis; Fluid flow; Fluid flow measurement; Image motion analysis; Monitoring; Multisensor systems; Optical fibers; Pressure measurement; Semiconductor device measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613698

Filename

613698