Title :
A micro-fluid channel calorimeter using BiSb/Sb thin film thermopiles
Author :
Zieren, M. ; Köhler, J.M.
Author_Institution :
Microsyst. Dept., Inst. of Phys. High Technol. Jena, Germany
Abstract :
Here, a new type of micro calorimeter is presented, characterized by a thermally insulated flow channel with two inlets and one outlet, an interdiffusion zone, and a detection zone with integrated thin film transducers based on thermopiles of the highly sensitive material combination of Bi0.87Sb0.13 and Sb. This micro fluid calorimeter can be integrated in flow injection arrangements. This way, the general principle of heat detection can be introduced in micro flow injection analysis and related applications. The micro fluid device is characterized by thermal relaxation measurements and by chemical testing
Keywords :
antimony; bismuth compounds; calorimeters; fluidic devices; micromachining; micropumps; microsensors; thermocouples; thermopiles; thin film devices; BiSb-Sb; anisotropic wet etching; chemical testing; detection zone; freestanding membrane; integrated thin film transducers; interdiffusion zone; micro flow injection analysis; micro fluid device; micro-fluid channel calorimeter; microcalorimeter; syringe pump; thermal relaxation; thermally insulated flow channel; thin film thermopiles; Biomembranes; Glass; Insulation; Polymer films; Silicon; Sputtering; Thermoelectricity; Transducers; Transistors; Wet etching;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613706
