Title :
Measuring conductivity, temperature and hydrogen peroxide concentration using a single sensor structure
Author :
Langereis, G.R. ; Olthuis, W. ; Bergveld, P.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
Using a single multi purpose sensor structure, consisting of metal films on a substrate only, three electrolyte parameters have been measured. The parameters are temperature, conductivity and hydrogen peroxide concentration, where the latter one represents one example of many species that can be determined amperometrically. The active area of the fabricated devices is about 1 mm2
Keywords :
chemical sensors; electrical conductivity measurement; electrochemical analysis; electrochemical electrodes; hydrogen compounds; microsensors; temperature measurement; 1 mm; H2O2; amperometric determination; conductivity measurement; electrolyte parameters; hydrogen peroxide concentration; interdigitated structure; metal films; sensor array; single multipurpose sensor structure; temperature measurement; Amperometric sensors; Conductivity measurement; Electrodes; Fingers; Intelligent sensors; Sensor arrays; Sensor phenomena and characterization; Temperature measurement; Temperature sensors; Transducers;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613707
