Measuring conductivity, temperature and hydrogen peroxide concentration using a single sensor structure

Author

Langereis, G.R. ; Olthuis, W. ; Bergveld, P.

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

543

Abstract

Using a single multi purpose sensor structure, consisting of metal films on a substrate only, three electrolyte parameters have been measured. The parameters are temperature, conductivity and hydrogen peroxide concentration, where the latter one represents one example of many species that can be determined amperometrically. The active area of the fabricated devices is about 1 mm²

Keywords

chemical sensors; electrical conductivity measurement; electrochemical analysis; electrochemical electrodes; hydrogen compounds; microsensors; temperature measurement; 1 mm; H₂O₂; amperometric determination; conductivity measurement; electrolyte parameters; hydrogen peroxide concentration; interdigitated structure; metal films; sensor array; single multipurpose sensor structure; temperature measurement; Amperometric sensors; Conductivity measurement; Electrodes; Fingers; Intelligent sensors; Sensor arrays; Sensor phenomena and characterization; Temperature measurement; Temperature sensors; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613707

Filename

613707