A bulk micromachined humidity sensor based on porous silicon

Author

O´Halloran, G.M. ; Sarro, P.M. ; Groeneweg, J. ; Trimp, P.J. ; French, P.J.

Author_Institution

Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

563

Abstract

This paper reports on the development of a micromachined membrane humidity sensor. The sensor utilises the capacitance technique to measure relative humidity. The membrane, which acts as the dielectric, is made porous using a standard anodisation technique. The advantages of this type of construction compared to the standard bulk-type sensor are outlined. Also, a heating resistor is incorporated underneath the membrane. This acts as a reset to the device by driving out excess moisture

Keywords

anodisation; capacitance measurement; elemental semiconductors; humidity sensors; membranes; micromachining; microsensors; porous materials; silicon; Si; anodisation technique; bulk micromachining; capacitance technique; device reset; heating resistor; micromachined membrane humidity sensor; porous Si; relative humidity measurement; Biomembranes; Capacitance; Capacitive sensors; Dielectric materials; Electrodes; Gold; Humidity; Laboratories; Resistors; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613712

Filename

613712