Title :
A bulk micromachined humidity sensor based on porous silicon
Author :
O´Halloran, G.M. ; Sarro, P.M. ; Groeneweg, J. ; Trimp, P.J. ; French, P.J.
Author_Institution :
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
Abstract :
This paper reports on the development of a micromachined membrane humidity sensor. The sensor utilises the capacitance technique to measure relative humidity. The membrane, which acts as the dielectric, is made porous using a standard anodisation technique. The advantages of this type of construction compared to the standard bulk-type sensor are outlined. Also, a heating resistor is incorporated underneath the membrane. This acts as a reset to the device by driving out excess moisture
Keywords :
anodisation; capacitance measurement; elemental semiconductors; humidity sensors; membranes; micromachining; microsensors; porous materials; silicon; Si; anodisation technique; bulk micromachining; capacitance technique; device reset; heating resistor; micromachined membrane humidity sensor; porous Si; relative humidity measurement; Biomembranes; Capacitance; Capacitive sensors; Dielectric materials; Electrodes; Gold; Humidity; Laboratories; Resistors; Silicon;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613712
