(Co/Pt)n multi-layers perpendicular magnetic recording media deposited by Ar, Kr or Xe gas

(Co/Pd)n multi-layers perpendicular recording media have larger perpendicular magnetic anisotropy than CoCr alloy ones and have actively been studied. But in this perpendicular media, the compatibility between low media noise and good thermal stability is required. In this study the possibility of lowering media noise was examined by depositing (Co/Pt)n multi-layers thin films with Ar, Kr or Xe gas and estimating their magnetic properties, film structure and magnetic cluster size. It is shown that the multi-layer perpendicular recording media deposited by Kr or Xe have higher Hc, lower α, smaller magnetic cluster size, smaller V_a and the possibility of low media noise.