Title :
Thin film porous membranes for catalytic sensors
Author :
Hughes, R.C. ; Boyle, T.J. ; Gardner, T.J. ; Brinker, C.J. ; Thomas, Ross
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
This paper reports on new and surprising experimental data for catalytic film gas sensing resistors coated with nanoporous sol-gel films to impart selectivity and durability to the sensor structure. This work is the result of attempts to build selectivity and reactivity to the surface of a sensor by modifying it with a series of sol-gel layers. The initial sol-gel SiO2 layer applied to the sensor surprisingly showed enhanced O2 interaction with H2 and reduced susceptibility to poisons such as H2S
Keywords :
catalysis; gas sensors; membranes; nanostructured materials; nickel alloys; palladium alloys; porous materials; silicon compounds; sol-gel processing; thin film resistors; H2; H2S; H2S poisoning; O2; Pd/Ni meander line resistor; PdNi-SiN-Si; Si; SiO2; catalytic film gas sensing resistors; catalytic sensors; durability; enhanced O2-H2 interaction; nanoporous sol-gel films; poison susceptibility; selectivity; sol-gel SiO2 layer; surface reactivity; thin film porous membranes; Biomembranes; Chemical sensors; Coatings; Hydrogen; Nanoporous materials; Resistors; Sensor phenomena and characterization; Temperature sensors; Thin film sensors; Toxicology;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613717
