• DocumentCode
    314182
  • Title

    Thin film porous membranes for catalytic sensors

  • Author

    Hughes, R.C. ; Boyle, T.J. ; Gardner, T.J. ; Brinker, C.J. ; Thomas, Ross

  • Author_Institution
    Sandia Nat. Labs., Albuquerque, NM, USA
  • Volume
    1
  • fYear
    1997
  • fDate
    16-19 Jun 1997
  • Firstpage
    581
  • Abstract
    This paper reports on new and surprising experimental data for catalytic film gas sensing resistors coated with nanoporous sol-gel films to impart selectivity and durability to the sensor structure. This work is the result of attempts to build selectivity and reactivity to the surface of a sensor by modifying it with a series of sol-gel layers. The initial sol-gel SiO2 layer applied to the sensor surprisingly showed enhanced O2 interaction with H2 and reduced susceptibility to poisons such as H2S
  • Keywords
    catalysis; gas sensors; membranes; nanostructured materials; nickel alloys; palladium alloys; porous materials; silicon compounds; sol-gel processing; thin film resistors; H2; H2S; H2S poisoning; O2; Pd/Ni meander line resistor; PdNi-SiN-Si; Si; SiO2; catalytic film gas sensing resistors; catalytic sensors; durability; enhanced O2-H2 interaction; nanoporous sol-gel films; poison susceptibility; selectivity; sol-gel SiO2 layer; surface reactivity; thin film porous membranes; Biomembranes; Chemical sensors; Coatings; Hydrogen; Nanoporous materials; Resistors; Sensor phenomena and characterization; Temperature sensors; Thin film sensors; Toxicology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
  • Conference_Location
    Chicago, IL
  • Print_ISBN
    0-7803-3829-4
  • Type

    conf

  • DOI
    10.1109/SENSOR.1997.613717
  • Filename
    613717