Micro tensile-test of silicon film having different crystallographic orientations

Uniaxial tensile testing of a single-crystal silicon film was carried out on a silicon chip. A tensile testing system was integrated on a silicon chip. A process for fabricating a test chip containing a specimen whose tensile axis has an arbitrary orientation was developed. The mechanical properties, such as elastic modulus and fracture strain, of silicon films having different orientations of ⟨100⟩, ⟨110⟩, and ⟨111⟩, are tested and compared