Title :
Mechanical characterization of microgrippers realized by LIGA technique
Author :
Basrour, Skandar ; Robert, Laurent ; Ballandras, Sylvain ; Hauden, Daniel
Author_Institution :
Inst. des Microtech. de Franche-Comte, Besancon, France
Abstract :
Metallic microgrippers, obtained by the LIGA technique, are studied. Design methods of such devices are presented and validated by the use of finite element analysis (FEA). Details on the fabrication process are also exposed. Experimental values of Young´s modulus and residual stresses of electroformed nickel have been measured. These data are used to improve the previous FEA. Comparison between experiments and numerical predictions are finally discussed
Keywords :
X-ray lithography; Young´s modulus; electroforming; finite element analysis; internal stresses; metals; microactuators; micromechanical devices; nickel; piezoelectric actuators; LIGA technique; Ni; PZT actuator; Young´s modulus; design methods; electroformed nickel; fabrication process; finite element analysis; mechanical characterization; metallic microgrippers; microgrippers; residual stresses; Actuators; Design optimization; Fabrication; Fasteners; Finite element methods; Grippers; Kinematics; Mechanical factors; Micromechanical devices; Nickel;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613722
