A microcatalytic support realised by LIGA technique: the devil´s comb

Author

Basrour, Skandar ; Mougin, Pascal ; Pons, Michel ; Bernede, Philippe ; Daniau, William ; Villermaux, Jacques

Author_Institution

Inst. des Microtech. de Franche-Comte, Besancon, France

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

649

Abstract

Microreactors are considered a new opportunity for R&D operations and for the production of hazardous or ultrapure materials where and when they are needed. Most chemical reactions are enhanced by a catalytic process involving a porous support for the catalyst. A microstructure exhibiting a fractal property is proposed as a porous network. A LIGA technique is used to manufacture a number of such structures. Limits and difficulties occurring are discussed

Keywords

X-ray lithography; catalysis; chemical technology; electroforming; fractals; micromachining; micromechanical devices; LIGA technique; X-ray lithography; catalytic process; devil´s comb; fractal property; microcatalytic support; microchemical components; micromachined systems; microreactors; porous support; ultrapure materials; Chemical processes; Chemical sensors; Chemical transducers; Diffusion processes; Fractals; Manufacturing; Mass production; Passive optical networks; Research and development; Teeth;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613735

Filename

613735