Title :
Fabrication of [CoB/Pd]/sub n/ multilayered perpendicular magnetic recording media using DC magnetron sputtering with N/sub 2/
Author :
Asahi, Takashi ; Tanaka, M. ; Sayama, J. ; Kawaji, J. ; Osaka, T. ; Matsunuma, S.
Author_Institution :
Adv. Res. Inst. for Sci. & Eng., Waseda Univ., Tokyo, Japan
Abstract :
[CoB/Pd]/sub n/ films were prepared with dc magnetron sputtering and the effect of preparation conditions, the addition of N/sub 2/ to Ar gas and heating of substrates during the deposition, on its microstructure and magnetic properties were examined.
Keywords :
boron alloys; cobalt alloys; coercive force; crystal microstructure; exchange interactions (electron); magnetic multilayers; palladium; perpendicular magnetic recording; sputter deposition; CoB-Pd; DC magnetron sputtering; coercivity; intergranular exchange coupling; microstructure; multilayered perpendicular magnetic recording medium; Artificial intelligence; Fabrication; Magnetic anisotropy; Magnetic films; Magnetic multilayers; Magnetic properties; Perpendicular magnetic anisotropy; Perpendicular magnetic recording; Sputtering; Substrates;
Conference_Titel :
Joint NAPMRC 2003. Digest of Technical Papers [Perpendicular Magnetic Recording Conference]
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-7746-X
DOI :
10.1109/NAPMRC.2003.1177032
