Title :
Gas-phase Silicon Etching With Bromine Trifluoride
Author :
Wang, Xuan-Qi ; Yang, Xing ; Walsh, Ken ; Tai, Yu-Chong
Author_Institution :
California Institute of Technology
Keywords :
Actuators; Etching; Printing; Silicon; Solid state circuits; Transducers; USA Councils;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.613740
