DocumentCode

314196

Title

Gas-phase Silicon Etching With Bromine Trifluoride

Author

Wang, Xuan-Qi ; Yang, Xing ; Walsh, Ken ; Tai, Yu-Chong

Author_Institution

California Institute of Technology

Volume

1

fYear

1997

fDate

16-19 Jun 1997

Firstpage

669

Lastpage

669

Keywords

Actuators; Etching; Printing; Silicon; Solid state circuits; Transducers; USA Councils;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613740

Filename

613740