Title :
Comprehensive characterization of BEOL-TDDB performance using very fast Voltage ramp Dielectric Breakdown tests
Author :
Aubel, O. ; Feustel, F. ; Hoffmann, T. ; Majer, M. ; Yiang, K.
Author_Institution :
GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Dresden, Germany
Abstract :
In this paper we present a model to generate voltage acceleration (Vacc) values from VRDB measurements with different ramp rates. The results have been verified with TDDB measurements.
Keywords :
electric breakdown; BEOL-TDDB performance; VRDB measurement; time dependent dielectric breakdown; voltage acceleration; voltage ramp dielectric breakdown tests; Breakdown voltage; Condition monitoring; Dielectric breakdown; Electric breakdown; Life estimation; Life testing; Logic testing; Performance evaluation; Shape; Temperature;
Conference_Titel :
Integrated Reliability Workshop Final Report, 2009. IRW '09. IEEE International
Conference_Location :
S. Lake Tahoe, CA
Print_ISBN :
978-1-4244-3921-8
Electronic_ISBN :
1930-8841
DOI :
10.1109/IRWS.2009.5383031
