Title :
Design and Fabrication of a Micro Coulter Counter with Thin Film Electrodes
Author :
Zheng, Siyang ; Tai, Yu-Chong
Author_Institution :
Electr. Eng., California Inst. of Technol., Pasadena, CA
Abstract :
We report a new approach for micro Coulter counter with thin film electrodes. Traditional Coulter counter measures DC resistance change to sense particles passing through an aperture between two flow chambers. One of the biggest challenges to miniaturize the device is to overcome the large resistance encountered. We propose a new approach to use thin film metal electrodes in micron size range for sensing. Resolution can be improved and it´s easy for system integration. A device based on this approach was built and tested
Keywords :
bioMEMS; biomedical equipment; biomedical measurement; blood; microelectrodes; thin film sensors; DC resistance measurement; MEMS device design; flow chamber; micro Coulter counter fabrication; thin film metal electrodes; Apertures; Biomedical electrodes; Blood; Counting circuits; Electric resistance; Electrical resistance measurement; Fabrication; Immune system; Impedance; Transistors; Coulter counter; impedance; particle sensing; thin film metal electrodes;
Conference_Titel :
Microtechnologies in Medicine and Biology, 2006 International Conference on
Conference_Location :
Okinawa
Print_ISBN :
1-4244-0338-3
Electronic_ISBN :
1-4244-0338-3
DOI :
10.1109/MMB.2006.251479
