DocumentCode
3145978
Title
Ferroelectric nanostructures
Author
Vrejoiu, I. ; Alexe, M. ; Hesse, D. ; Lee, W. ; Goesele, U.
Author_Institution
Max Planck Inst. of Microstructure Phys., Halle
fYear
2008
fDate
15-17 Sept. 2008
Abstract
Summary form only given. Scaling down to tens of nanometers or even below is appealing for device miniaturization, on one hand, and for exploring/exploiting novel phenomena arising from nanometer-size effects. Ferroelectric (FE) materials have been proposed for nonvolatile ferroelectric random access memories since two decades (J.F. Scott and C.A.P.D. Araujo, 1989) and lateral dimensions of ca. 100 nm are required for FE dots in order to reach the Gigabit/cm2 memory densities. Hence, the fundamental studies of the properties of FE nanostructures and ultrathin films is a prerequisite for device optimization. In the present lecture we will discuss ferroelectric nanostructures generated either by pulsed laser deposition or by other means. The fabrication and properties of two-dimensional superlattice structures of complex oxides as well as of arrays of ferroelectric nanodots and ferroelectric nanotubes will be discussed. We will pay special attention to the fabrication of appropriate templates and masks, which allow lateral nanostructuring. Extensive examples of recent work on ferroelectric nanostructures involving MPI-Halle will be given.
Keywords
arrays; ferroelectric materials; ferroelectric thin films; masks; nanofabrication; nanotubes; pulsed laser deposition; superlattices; ferroelectric nanodot array; ferroelectric nanostructures; ferroelectric nanotube array; lateral nanostructuring; mask fabrication; pulsed laser deposition; template fabrication; two-dimensional superlattice structure; ultrathin ferroelectric film; Ferroelectric materials; Iron; Nanoscale devices; Nanostructured materials; Nanostructures; Nonvolatile memory; Optical device fabrication; Optical pulse generation; Pulsed laser deposition; Random access memory;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets, 2008. ISE-13. 13th International Symposium on
Conference_Location
Tokyo
Print_ISBN
978-1-4244-1850-3
Electronic_ISBN
978-1-4244-1851-0
Type
conf
DOI
10.1109/ISE.2008.4813987
Filename
4813987
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