• DocumentCode
    3145978
  • Title

    Ferroelectric nanostructures

  • Author

    Vrejoiu, I. ; Alexe, M. ; Hesse, D. ; Lee, W. ; Goesele, U.

  • Author_Institution
    Max Planck Inst. of Microstructure Phys., Halle
  • fYear
    2008
  • fDate
    15-17 Sept. 2008
  • Abstract
    Summary form only given. Scaling down to tens of nanometers or even below is appealing for device miniaturization, on one hand, and for exploring/exploiting novel phenomena arising from nanometer-size effects. Ferroelectric (FE) materials have been proposed for nonvolatile ferroelectric random access memories since two decades (J.F. Scott and C.A.P.D. Araujo, 1989) and lateral dimensions of ca. 100 nm are required for FE dots in order to reach the Gigabit/cm2 memory densities. Hence, the fundamental studies of the properties of FE nanostructures and ultrathin films is a prerequisite for device optimization. In the present lecture we will discuss ferroelectric nanostructures generated either by pulsed laser deposition or by other means. The fabrication and properties of two-dimensional superlattice structures of complex oxides as well as of arrays of ferroelectric nanodots and ferroelectric nanotubes will be discussed. We will pay special attention to the fabrication of appropriate templates and masks, which allow lateral nanostructuring. Extensive examples of recent work on ferroelectric nanostructures involving MPI-Halle will be given.
  • Keywords
    arrays; ferroelectric materials; ferroelectric thin films; masks; nanofabrication; nanotubes; pulsed laser deposition; superlattices; ferroelectric nanodot array; ferroelectric nanostructures; ferroelectric nanotube array; lateral nanostructuring; mask fabrication; pulsed laser deposition; template fabrication; two-dimensional superlattice structure; ultrathin ferroelectric film; Ferroelectric materials; Iron; Nanoscale devices; Nanostructured materials; Nanostructures; Nonvolatile memory; Optical device fabrication; Optical pulse generation; Pulsed laser deposition; Random access memory;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrets, 2008. ISE-13. 13th International Symposium on
  • Conference_Location
    Tokyo
  • Print_ISBN
    978-1-4244-1850-3
  • Electronic_ISBN
    978-1-4244-1851-0
  • Type

    conf

  • DOI
    10.1109/ISE.2008.4813987
  • Filename
    4813987